EBM-TEG
- 适用于热离子扫描电镜的三极电源
- 高精度、低纹波、超稳定
- 过流保护/ 过压保护
- 提供OEM定制
- 符合UL、CE和RoHS
*注：所有规格如有变更，恕不另行通知。有关最新修订，请查阅本数据表的英文 PDF 版本。
三极电源用于热离子扫描电镜
EBM30N/TEG 是一个完整的解决方案，提供热离子发射扫描电子显微镜(SEM)所需的高压。与其他 SEM 电源相比，斯派曼专有的包装和封装技术在尺寸、成本和性能方面都有显著改善。
此单元提供了一个高调节、低噪声、超稳定的加速器电源可编程从 0 至 -30kV 在 170uA，以及浮动灯丝和 Bias 电源参考加速器来控制光束。此单元还包括驱动检测器的高压输出， 包括 PMT、Scintillator 和 Collector 接地输出。
编程信号利用差分模拟输入来最小化外部噪声和补偿电压的影响。提供了接地参考发射电流检测和灯丝故障信号。
规格
(Ref. 128031-001 REV. A)
SPECIFICATIONS
Input Voltage:
+24Vdc, ±5% @ 2.5A max.
Scintillator Output:
Custom ’Poke home’ receptacle manufactured by Spellman. For mating cables, see HOW TO ORDER information below.
PMT and Collector Outputs:
Industry standard BNC.HT receptacle: Radiall R316 553
Temperature:
Operating: 0°C to +45°C
Storage: -20°C to +75°C
Humidity:
0 to 85% RH, non-condensing
Dimensions:
4.13˝ H x 9.85˝ W x 7.48˝ D (105mm x 250mm x 190mm) excluding the top mounting bracket
Weight:
16.5 lbs. (7.5kg)
Regulatory Approvals:
UL recognized component (RC). File number E354595. Compliant to IEC/UL 61010-1 Safety requirements for electrical equipment for measurement, control and laboratory use; CAN/CSA-C22.2 No.61010-1. CE marked to EN 61010-1. UKCA marked to BS EN 61010-1. RoHS compliant. (As the unit is designed for incorporation within the users system it is not tested against any specific EMC standards. The user will need to take appropriate EMC precautions when designing the unit in and verify the overall system EMC performance against any relevant standards.)
OUTPUT SPECIFICATIONS
| Output | Accelerator (Internal Supply) |
Bias Cancellation (Internal Supply) |
Filament | PMT | Scintillator | Collector |
|---|---|---|---|---|---|---|
| Output Voltage | 0 to -30kV, referenced to ground | 0 to +3.5kV referenced to Accelerator* | -1.936 to +1.936V referenced to Accelerator | 0 to -1300V referenced to ground | +8kV to +11kV referenced to ground | 30V to 500V referenced to ground |
| Output current - max | 170μA | 150μA |
3.87A | 1mA (current trip level: 1.2mA) | 250μA | 5mA |
| Accuracy | ±2% or ±20V (whichever is greater) | ±10% or ±180V (whichever is greater) | 0.1V | ±2% or ±1V (whichever is greater) | ±2% | ±5% |
| Load Regulation | <100ppm for 0 to 170μA | N/A | <2% for 10% change in load resistance | <100ppm for 0 to 1mA | <500ppm for 0 to 250μA | <5% for 0 to 5 mA |
| Line Regulation for a ±5% line change | <100ppm | <0.1% | <1% | <100ppm | <500ppm | <5% |
| Ripple p-p at max output | <20ppm | <5ppm | <0.1% | <200mV | <0.1% | <0.2% |
| Temperature Coefficient | <100 ppm/°C | <1000 ppm/°C | <300 ppm/°C | <1000 ppm/°C | <100 ppm/°C | <1000 ppm/°C |
| Stability (1hr warm up) | 8ppm/3min | 1%/10min | 100ppm/10min | 200ppm/1h | 500ppm/8h | <1500ppm/1h |
| Rise time (switch on) | 1 to 3s (0 to 90%) | <1s (0 to 90%) | 250ms (0 to 90%) | <1s (0 to 90%) | <1s (0 to 90%) | <1s (0 to 90%) |
| Fall time (switch off) | <100s (to < 50V) | <100s (to < 50V) | <0.5s (100% to 10%) | <10s (to < 50V) | <10s (to < 100V) | <10s (to < 50V) |
*The positive Bias Cancellation voltage reduces the negative Bias output, allowing the emission current to flow (see User Guide for more information).
PL1 INPUT POWER CONNECTOR JST MODEL B 5PS-VH
| Pin | Signal | I/O | Signal Parameters | Remarks |
|---|---|---|---|---|
| 1 | +24V | I | DC24V Input | Pins connected internally |
| 2 | +24V | I | DC24V Input | Pins connected internally |
| 3 | 0V | I | DC24V Common | Pins connected internally |
| 4 | 0V | I | DC24V Common | Pins connected internally |
| 5 | FG | - | Case Ground | Internally connected to 0V |
PL2 DIGITAL I/O CONNECTOR JST MODEL S10B-EH
| Pin | Signal | I/O | Signal Parameters |
|---|---|---|---|
| 1 | Remote on/off | I | Outputs 1,2 and 3 (Acc., Bias, Fil.) remote on/off. High = off |
| 2 | Remote 4 on/off | I | P.M.T remote on/off. High = off |
| 3 | Remote 5 on/off | I | Scintillator remote on/off. High = off |
| 4 | Remote 6 on/off | I | Collector remote on/off. High = off |
| 5 | Remote signal gnd | I | 0V connection for remote controls |
| 6 | Filament open cct | O | High = failed |
| 7 | Filament OC return | O | 0V |
| 8 | N/C | - | N/C |
| 9 | N/C | - | N/C |
| 10 | N/C | - | N/C |
PL3 ANALOG I/O CONNECTOR JST MODEL S15B-EH
| Pin | Signal | I/O | Parameters |
|---|---|---|---|
| 1 | Fil Prog (+) | I | 0 to 4V differential input = 0 to 4V Filament output |
| 2 | Fil Prog (-) | I | 0 to 4V differential input = 0 to 4V Filament output |
| 3 | Bias Cancel Prog (+) | I | 0 to 3.5V differential input = 0 to 3.5kV Bias Cancellation output |
| 4 | Bias Cancel Prog (-) | I | 0 to 3.5V differential input = 0 to 3.5kV Bias Cancellation output |
| 5 | Acc Prog (+) | I | 0 to 6V differential input = 0 to -30kV Accelerator output |
| 6 | Acc Prog (-) | I | 0 to 6V differential input = 0 to -30kV Accelerator output |
| 7 | EMS Monitor | O | Emission Current Monitor Output. 0 to 10V = 0 to 200μA Limited to 12V max. ±3% or 0.1V, whichever is greater |
| 8 | EMS Mon 0V | O | Emission Current Monitor Output. 0 to 10V = 0 to 200μA Limited to 12V max. ±3% or 0.1V, whichever is greater |
| 9 | PMT Prog (+) | I | 0 to 6.5V differential input = 0 to 1300V P.M.T output |
| 10 | PMT Prog (-) | I | 0 to 6.5V differential input = 0 to 1300V P.M.T output |
| 11 | Scintillator Prog (+) | I | 0 to 5.5V differential input = 0kV to 11kV Scintillator output |
| 12 | Scintillator Prog (-) | I | 0 to 5.5V differential input = 0kV to 11kV Scintillator output |
| 13 | Collector Prog | I | 0 to 5V differential input = 0 to 500V Collector output |
| 14 | Collector Prog 0V | I | 0 to 5V differential input = 0 to 500V Collector output |
| 15 | N/C | - | N/C |
HOW TO ORDER
| Description | Part Number |
|---|---|
| EBM-TEG | EBM30N/TEG |
| Low voltage mating connectors accessory Kit | 13802-27 |
| HV Out Cable - 2 meters | HVC30/3SO/1317 |
| HV Out Cable - 3 meters | HVC30/3SO/1314 |
| HV Out Cable - 5 meters | HVC30/3SO/1315 |
| Scintillator Cable - 1 meter | HVC11/1SO/1320 |
| Scintillator Cable - 2 meters | HVC11/1SO/1316 |
表和图
DIMENSIONS: in.[mm]
FRONT VIEW
TOP VIEW
SIDE VIEW
Note: An accessory kit which contains the mating housings and crimps for the low voltage connectors is available to order free of charge. See HOW TO ORDER table.
