EBM-TEGR

用于热电子发射 SEM 的三极管电源
高精度、低噪音、超稳定
过电流/电压、电弧和短路保护
RS-232 或 RS-485 数字接口
用于测试和开发工作的免费 GUI
可提供 OEM 定制
符合 CE、UKCA 和 RoHS 标准

*注意：所有规格如有更改，恕不另行通知。请查阅此数据表的英文 PDF 版本以获得最新版本。

2 Year Extended Warranty RoHs Compliant logo

Data Sheet

iBeam/eBeam Brochure

用于热电子发射 SEM 的集成三极管电源

EBM-TEGR 是一个完整的解决方案，可在 19 英寸机架安装机箱中提供热离子发射扫描电子显微镜 (SEM) 所需的高压。

与其他 SEM 电源产品相比，斯派曼专有的封装和封装技术在尺寸、成本和性能方面有了显着改进。

该装置提供高度调节、低噪声、超稳定的加速器电源，可编程至 -30kV，电流为 400uA。这与参考加速器的浮动灯丝和网格电源一起控制光束。该装置还包括用于驱动探测器的高压输出，包括 PMT、闪烁体和集电极接地输出。

这种集成 EBM-TEGR 电源系统的客户控制是通过 RS-232 或可选的 RS-485 接口完成的。提供五个互锁。该装置带有 CE 和 UKCA 标志。

规格

^{(Ref. 128031-001 REV. A)}

SPECIFICATIONS

Input Voltage:

100 to 264 Vac @2A max. 47 to 63Hz

Temperature:

Operating: 10°C to +45°C
Storage: -10°C to +70°C

Humidity:

0 to 90% RH, non-condensing

Interlocks:

Five interlocks are provided on a 9 pin D connector (see pinout details).
The EHT, Collector, Scintillator and PMT interlocks disable the corresponding outputs when open (the other outputs can be powered up).
The Vacuum interlock disables the gun supplies (EHT and heater) when open.

Front Panel Indicators:

POWER ON: Green LED
INTERLOCKS: Yellow LED indicates that all the interlocks are closed and the unit is able to generate high voltage.
HV ON: Yellow LED indicates that the high voltage EHT (Accelerator) Output is energized.
RS-232/RS-485: Yellow LED indicates when communications are taking place on the RS-232/RS-485 bus.
FAULT: Red LED indicates that an Error condition has occurred.

Input Power Connector::

I.E.C. 320 Receptacle with integral fuse

High Voltage Output Connectors:

Grid and Filament: Claymount CA1 type 03 (see drawing)
A mating cable assembly is available (see drawing and How To Order table)
Collector and PMT: BNC HT-MHV Receptacle Radiall R316553000
Scintillator: SHV Receptacle Radiall R317580000

Protection:

All outputs are protected from arcs in the load and continuous short circuit to ground and between each other.

- If the Beam Energy has more than 4 arcs in a 10 minutes period, unit will disable all outputs and sets all programs to zero.
- In case of an over temperature condition for greater than 100° C for ten seconds all outputs will be disabled.
- Over voltage, over current and internal communication issues are also monitored and trigger fault conditions.
- The unit reports fault or trip conditions through status flags. After a Trip occurs, the unit can be reset through software (digital interface) or power cycle.

Dimensions:

See drawing

Weight:

39.7 lbs. (18kg)

Regulatory Approvals:

Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.

OUTPUT SPECIFICATIONS

OUTPUT	Accelerator (EHT)	Filament	Grid	PMT	Scintillator	Collector
Output Voltage	-100V to -30kV, referenced ground	5V max, 15W max center tapped to the Accelerator	-35V to -1650V referenced to Accelerator	0V to -1300V referenced to ground	+50V to +1kV referenced to ground	-400V to +400V referenced to ground
Output current - max	400μA	5A	400μA	1mA (current trip level: 1.2mA)	200μA	4μA
Accuracy	±2% or ±30V (whichever is greater)	±5% or ±100mA (whichever is greater)	N/A	±2% or ±1V (whichever is greater)	<1% or ±10V (whichever is greater)	±2% or ±2V (whichever is greater)
Load Regulation	<10ppm for 30μA to 400μA	<5mA for a 0.4Ω to 1Ω change at 3A	N/A	<±100ppm for 0 to 1mA	<100ppm for 10μA to 200μA	<5% for 0 to 5 mA
Line Regulation at full load ± 10% line change	<10ppm	<5mA	N/A	<100ppm	<100ppm	<10mV
Ripple p-p at max. output	<100mV	1mA at 50Hz 30mV at 100kHz at 3A,1Ω	N/A	<200mV	<100mV	<25mV
Temperature Coefficient	50 ppm/°C	<300 ppm/°C	N/A	<100 ppm/°C	<250 ppm/°C	<50 ppm/°C
Stability (1h warm up)	<10 ppm/15min <25 ppm/1h	<2mA/1h	<0.4μA/15min	200 ppm/1h	<1%/1h	<50mV/15min

INTERLOCKS CONNECTOR 9 PIN D SUB-FEMALE

Pin	Signal	I/O	Signal Parameters
1	0V	-	Ground
2	24V	O	24V Output from unit (connected to pin 6 internally)
3	Collector	I	Input for collector interlock
4	Scintillator	I	Input for Scintillator interlock
5	Vacuum	I	Input for vacuum interlock (connected to pin 8 internally)
6	24V	O	24V output from unit (connected to pin 2 internally
7	EHT	I	Input for EHT interlock
8	Vacuum	I	Input for vacuum interlock (connected to pin 5 internally)
9	PMT	I	Input for PMT interlock