EBM20N5/24

  • 用于电子束列的三级电源
  • 高精度、低噪声、超稳定
  • 过电流/电压保护
  • 电弧和短路保护
  • 提供 OEM 定制
  • 符合 CE 和 RoHS 标准,设计满足 UL

*注:所有规格如有更改,恕不另行通知。请参阅此数据表的 英文PDF版本已获得最新的修订本。

2 Year Extended Warranty CE, ROHS, UL Marking

适用于SEM 应用的OEM 模块

EBM20 在热离子扫描电子显微镜中提供电子束列 ,在一个单一紧凑的封装中提供加速器、偏压和灯丝源。与其他SEM电源产品相比,斯派曼专有的高压封装技术在尺寸、成本和性能上带来了巨大的改进。EBM20 提供一个高度调节、低噪声、超稳定的加速器电源,可编程从 0 至 -20kV 以 200uA。EBM20 有浮动偏置和灯丝供应参考加速器。编程信号利用差分模拟输入来最小化外部噪声和偏置电压的影响。提供了一个地参考加速器电流监测。

EBM20 是电弧和短路免疫的,以及过电压和过电流保护。

典型应用:

  • 扫描电子显微镜

规格

(Ref. 128031-001 REV. C)

SPECIFICATIONS:

Input Voltage:

+24Vdc, ±5%, 1.5A maximum

High Voltage Outputs:

ACCELERATOR:

Voltage:

0V to -20kV full load with respect to ground

Current:

250μA maximum (including feedback current), continuous
from -500V to -20kV.

Current Trip Level:

275mA, ±10%. Trips off all outputs, reset by cycling
i nput power

Accuracy (voltage program):

±1% from -500V to -20kV

Load Regulation:

<±100ppm, 20μA to 250μA load change

Line Regulation:

<±100ppm for 10% line change

Ripple:

<20ppm p-p at -20kV, 250μA, maximum bias and filament output

Temperature Coefficient:

<100ppm/°C

Stability:

30ppm/3 minutes at 100μA load current after 1 hour warm up

Rise Time (switch ON):

<3 seconds (0% to 90%) with no overshoot

Fall Time (switch OFF):

<100 seconds (to <50 volts)

BIAS:

(Referenced to Accelerator)

Voltage:

0 to +1.5kV (max allowable output limited to 2kV)

Current:

150µA maximum

Accuracy (voltage program):

±3% of full scale

Line Regulation:

<±0.1% for 10% line change

Ripple:

<0.1% p-p

Temperature Coefficient:

<1000ppm/°C

Stability:

1%/10 minutes

Rise Time (switch ON):

<3 seconds (0% to 90%) with no overshoot

Fall Time (switch OFF):

<100 seconds (to <50 volts)

FILAMENT:

(center voltage WRT accelerator output)

Power:

0 to 12W

Load Resistance:

1.33Ω ±5%

Accuracy:

±3% of FS

Load Regulation:

<1% for 10% change in load resistance

Line Regulation:

<1% for 10% line voltage change

Ripple:

<0.1% p-p max

Temperature Coefficient:

<300ppm/°C

Stability:

100ppm/10 minutes

INTERFACE:

Input:

Analog control for accelerator, filament and bias

High Voltage Output:

Custom 3 pin receptacle and cable assembly

Temperature:

Operating: 5°C to +40°C

Storage: -20°C to +50°C

Humidity:

20% to 85% RH, non-condensing

Dimensions:

10.63˝H x 2.36˝W x 7.87˝D (270mm x 60mm x 200mm) excluding any mounting brackets

Weight:

<10 lbs. (4.5kg)

Regulatory Approvals:

UL recognized component (RC). File number E354595. Compliant to IEC/UL 61010-1 Safety requirements for electrical equipment for measurement, control and laboratory use; CAN/CSA-C22.2 No.61010-1. CE marked to EN 61010-1. UKCA marked to BS EN 61010-1. RoHS compliant. As the unit is designed for incorporation within the users system it is not tested against any specific EMC standards. The user will need to take sensible EMC precautions when designing the unit in and verify the overall system EMC performance against any relevant standards.

POWER INPUT CONNECTOR JHA2 3 PIN JST MODEL B 3PS-VH

Pin Signal Parameters
1 +24V High Voltage Power Input +24Vdc Input
2 0V Input +24Vdc Common
3 FG Chassis Ground
 

CONTROL AND MONITORING CONNECTOR JHA3 10 PIN JST MODEL S10B-EH

Pin Signal Parameters
1 FIL PROG (+) Filament Program (+) Input
2 GND Ground
3 BIAS (+) Bias (+) Input
4 GND Ground
5 ACC PROG (+) Acc Voltage Program (+) Input
6 GND Ground
7 EMS Emission Current Monitor Output
8 GND Ground
9 ACC MON ACC Voltage Monitor Output
10  GND  Ground

 

How to order:
Standard: PART NO.:EBM20N5/24
HV Cable: PART NO.:HVC30/3IS/LL1650 (1.65m Cable)

表和图

HV CABLE ASSEMBLY DETAILS

EBM20 Series

EBM20 Series

DIMENSIONS: in.[mm]

SIDE VIEW

EBM20 Series

TOP VIEW

EBM20 Series

FRONT VIEW

EBM20 Front View 

SIDE VIEW

EBM20 Series