EBM60-FEG

  • 用于场发射 SEM 的集成四极管电源
  • 非常低的纹波和超稳定的输出
  • 强大的电弧和短路保护
  • 旨在最大限度地减少微放电事件
  • RS-232 数字接口
  • 用于测试和开发工作的免费 GUI
  • CE、UKCA 和 RoHS 标志

*注:所有规格如有更改,恕不另行通知。 请查阅该数据表的英文 PDF版本以获取最新版本。

2 Year Extended Warranty RoHs Compliant logo 

用于场发射 SEM 的集成四极管电源

斯派曼的 EBM60-FEG 系列是一款集成多路高压电源,专门设计用于驱动场发射扫描电子显微镜 (SEM) 。斯派曼广泛的应用知识使我们能够开发一系列可定制的技术平台,以满足 SEM 的苛刻要求。

主加速电压是一个高稳定性的 60kV 电源,具有驱动场发射、冷阴极和肖特基电子源所需的集成浮动灯丝、提取器和抑制器输出。所有输出均具有超低输出纹波、最小微放电、出色的调节、稳定性、温度系数和精度规格,可实现前所未有的图像质量和分辨率。通过斯派曼专有的高压隔离技术提供对各个浮动源的隔离和控制。

该集成 EBM60-FEG 电源系统的客户控制是通过 RS-232 接口完成的。该装置带有 CE 和 UKCA 标志。

典型应用:
扫描电子显微镜 (SEM)
电子束控制器

 

(Ref. 128158-001 REV. A)

SPECIFICATIONS

Input Voltage:

100 to 240 Vac ±10% @1A max. 50 to 60 Hz ±5%

Environmental:

Operating Temperature: +10°C to +45°C ambient for normal operation. The unit will operate from 0°C but will require an extended warm up period.
Storage Temperature: -25°C to +60°C
Humidity: 0 to 85% RH, non-condensing

Mechanical:

The unit can be operated in any orientation. 

Front Panel Indicators:

-Power On
-Interlocks enabled (both interlocks are closed)
-HV On (any of the HV outputs are enabled)
-Warning (any of the internal warning levels exceeded)
-Operating (unit running correctly)
-Trip
-Fault
-Serial Bus (communication taking place)

Status Outputs:

The unit has three digital outputs to indicate status conditions through TTL signals (high when the corresponding LED is illuminated)
1  - HV on
2 - Fault
3 - Unit Operating

Test GUI:

A product GUI can be provided free of charge for customer testing and development work.

Interlocks: 

Two separate interlocks are provided:
Gun interlock: 24V output provided for an external volt free interlock

HV cable interlock: interlock plate mounted over the HV connector

If any interlock is not present: all high voltage supplies including filament are shut down, however communication over the serial interfaces remains operational.

Protection:

-All outputs are protected from arcs in the load (repetition rate up to 0.1 Hz) and continuous short circuit.
-The unit monitors the temperature of the main power semiconductors and shutdown the relevant outputs if a temperature become excessive. 
-All low voltage inputs are protected against over voltages of ±30 Volts.
-The power input is protected against over voltage and reversed connection.

Weight:

86 lbs. (39kg)

Regulatory Approvals:

Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.

规格

OUTPUT SPECIFICATIONS

Output Accelerator
 Filament  Supressor  Extractor
Output Voltage -200V to -60kV referenced to ground nominal 1V max 1.5V referenced to Accelerator -10V to -1kV referenced to Beam Energy   200V to 5kV
referenced to Beam Energy
Output current - max 300μA 3A  100μA  500μA 
Current Trip  350μA ±10% Output disabled and program set to zero  >3.15A for 10s. All outputs disabled and programs set to zero >120mA ±10%
All outputs disabled and programs set to zero
600μA ±10%
All outputs disabled and programs set to zero  
Accuracy ±5V ±5mA (between 2A to 3A)  ±14V   ±2%
Linearity < ± 5V between 500V and 60kV ±10mA  ±14V  ±2V  
Load Regulation <±10ppm for 30μA to 400μA <5mA for 10% in load resistance <± 100ppm for 10μA to 90μA <± 100ppm for 10μA to 500μA
Line Regulation or a ± 10% line change  <±10ppm <1mA  <±10ppm <±10ppm 
Ripple p-p at max. output <120mVp-p at 1Hz to 1MHz <40mAp-p 20Hz to 10kHz across 0.5Ω @ 2.5A <10mVp-p at 1Hz to 1MHz <50mV p-p at 1Hz to 1MHz
Temperature Coefficient <20 ppm/°C at 60kV after 1h warm up <20 ppm/°C <50 ppm/°C <25 ppm/°C
Stability (1h warm up)  <15ppm or 40mV (whichever is greater) /10min <30ppm/10min and 5mA/3 months @ 2.5A <100ppm/10min <20ppm/10min 
Voltage Monitor Resolution 1.14V  62.5μV  19mV 97mV
Voltage Monitor Accuracy  ±1% or ±50V ±5% or ±25mV
±0.5% or ±0.5V  ±0.5% or ±3V 
Current Monitor Resolution 5.7nA  62.5μA   2.3nA  11nA 
Current Monitor Accuracy  ±1μA  ±1% or ±5mA ±2μA  ±0.5% or ±2μA 
Additional info  Programmable Wobble feature. Sinusoidal, 0V to 500V p-p, 0.2Hz to 2Hz
 
Open Circuit detection: Vout > 3.1 ± 0.1V All outputs disabled and programs set to zero. Optimized for a nominal load resistance of 0.5Ω    
 

GUN INTERLOCK CONNECTOR 3 PIN MATE-N-LOK
(TE CONN. P/N: 1-350943-0)

PIN SIGNAL I/O  PARAMETER
1 Interlock 24V Return
2 N/C -  
3 Interlock + 24V Drive 

STATUS OUTPUT CONNECTOR 9 PIN FEMALE D

PIN SIGNAL I/O PARAMETER
1 HV ON O High voltage status, logic high* when any of the HV outputs is enabled   
2 HV ON GND - High voltage status return
3 Fault O Fault status, logic high* when any internal fault is detected
4 Fault GND - Fault status return
5 UO O Unit Operating status, logic high* when the unit is running correctly 
6 UO GND Unit Operating status return
7 N/C No connection
8 N/C - No connection
9 N/C - No connection

*TTL Signal: High > 2.7V, Low <0.8V

RS-232 COMMUNICATION CONNECTOR 9 PIN MALE D

PIN SIGNAL I/O PARAMETER
1 N/C - No connection   
2 RS232 TXD I RS-232 receive data
3 RS232 TXD O RS-232 transmit data
4 N/C - No connection
5 GND - Ground 
6 N/C No connection
7 N/C No connection
8 N/C - No connection
9 N/C - No connection

 

INPUT POWER CONNECTOR
I.E.C. 320 Receptacle with integral fuse

HIGH VOLTAGE OUTPUT CONNECTOR
The unit uses a Claymount CA4 75kV 4 pin receptacle. Mating cable assemblies in different lengths are available. See HOW TO ORDER table.

 

EBM60 FEG Claymount CA4 75kV 4 pin receptacle

 

CE MarkingUK-CARoHs Compliant logo

HOW TO ORDER

Description Part Number
EBM60-FEG EBM60N18/FEG
HV Output Cable - 3 meters HVC75/4SO/1365
HV Output Cable - 4 meters HVC75/4SO/1366

表和图

DIMENSIONS: in.[mm]

 

SIDE VIEW

EBM60 Side View
TOP VIEW

EBM60 Top View
REAR VIEW

EBM60 Rear View