
EBM60-FEG
- 用于场发射 SEM 的集成四极管电源
- 非常低的纹波和超稳定的输出
- 强大的电弧和短路保护
- 旨在最大限度地减少微放电事件
- RS-232 数字接口
- 用于测试和开发工作的免费 GUI
- CE、UKCA 和 RoHS 标志
*注:所有规格如有更改,恕不另行通知。 请查阅该数据表的英文 PDF版本以获取最新版本。
用于场发射 SEM 的集成四极管电源
斯派曼的 EBM60-FEG 系列是一款集成多路高压电源,专门设计用于驱动场发射扫描电子显微镜 (SEM) 。斯派曼广泛的应用知识使我们能够开发一系列可定制的技术平台,以满足 SEM 的苛刻要求。
主加速电压是一个高稳定性的 60kV 电源,具有驱动场发射、冷阴极和肖特基电子源所需的集成浮动灯丝、提取器和抑制器输出。所有输出均具有超低输出纹波、最小微放电、出色的调节、稳定性、温度系数和精度规格,可实现前所未有的图像质量和分辨率。通过斯派曼专有的高压隔离技术提供对各个浮动源的隔离和控制。
该集成 EBM60-FEG 电源系统的客户控制是通过 RS-232 接口完成的。该装置带有 CE 和 UKCA 标志。
典型应用:扫描电子显微镜 (SEM)
电子束控制器
(Ref. 128158-001 REV. A)
SPECIFICATIONS
Input Voltage:
100 to 240 Vac ±10% @1A max. 50 to 60 Hz ±5%
Environmental:
Operating Temperature: +10°C to +45°C ambient for normal operation. The unit will operate from 0°C but will require an extended warm up period.
Storage Temperature: -25°C to +60°C
Humidity: 0 to 85% RH, non-condensing
Mechanical:
The unit can be operated in any orientation.
Front Panel Indicators:
-Power On
-Interlocks enabled (both interlocks are closed)
-HV On (any of the HV outputs are enabled)
-Warning (any of the internal warning levels exceeded)
-Operating (unit running correctly)
-Trip
-Fault
-Serial Bus (communication taking place)
Status Outputs:
The unit has three digital outputs to indicate status conditions through TTL signals (high when the corresponding LED is illuminated)
1 - HV on
2 - Fault
3 - Unit Operating
Test GUI:
A product GUI can be provided free of charge for customer testing and development work.
Interlocks:
Two separate interlocks are provided:
Gun interlock: 24V output provided for an external volt free interlock
HV cable interlock: interlock plate mounted over the HV connector
If any interlock is not present: all high voltage supplies including filament are shut down, however communication over the serial interfaces remains operational.
Protection:
-All outputs are protected from arcs in the load (repetition rate up to 0.1 Hz) and continuous short circuit.
-The unit monitors the temperature of the main power semiconductors and shutdown the relevant outputs if a temperature become excessive.
-All low voltage inputs are protected against over voltages of ±30 Volts.
-The power input is protected against over voltage and reversed connection.
Weight:
86 lbs. (39kg)
Regulatory Approvals:
Compliant to EEC Low Voltage Directive. UK Conformity Assessed. RoHS Compliant.
规格
OUTPUT SPECIFICATIONS
Output | Accelerator |
Filament | Supressor | Extractor |
---|---|---|---|---|
Output Voltage | -200V to -60kV referenced to ground | nominal 1V max 1.5V referenced to Accelerator | -10V to -1kV referenced to Beam Energy | 200V to 5kV referenced to Beam Energy |
Output current - max | 300μA | 3A | 100μA | 500μA |
Current Trip | 350μA ±10% Output disabled and program set to zero | >3.15A for 10s. All outputs disabled and programs set to zero | >120mA ±10% All outputs disabled and programs set to zero |
600μA ±10% All outputs disabled and programs set to zero |
Accuracy | ±5V | ±5mA (between 2A to 3A) | ±14V | ±2% |
Linearity | < ± 5V between 500V and 60kV | ±10mA | ±14V | ±2V |
Load Regulation | <±10ppm for 30μA to 400μA | <5mA for 10% in load resistance | <± 100ppm for 10μA to 90μA | <± 100ppm for 10μA to 500μA |
Line Regulation or a ± 10% line change | <±10ppm | <1mA | <±10ppm | <±10ppm |
Ripple p-p at max. output | <120mVp-p at 1Hz to 1MHz | <40mAp-p 20Hz to 10kHz across 0.5Ω @ 2.5A | <10mVp-p at 1Hz to 1MHz | <50mV p-p at 1Hz to 1MHz |
Temperature Coefficient | <20 ppm/°C at 60kV after 1h warm up | <20 ppm/°C | <50 ppm/°C | <25 ppm/°C |
Stability (1h warm up) | <15ppm or 40mV (whichever is greater) /10min | <30ppm/10min and 5mA/3 months @ 2.5A | <100ppm/10min | <20ppm/10min |
Voltage Monitor Resolution | 1.14V | 62.5μV | 19mV | 97mV |
Voltage Monitor Accuracy | ±1% or ±50V | ±5% or ±25mV |
±0.5% or ±0.5V | ±0.5% or ±3V |
Current Monitor Resolution | 5.7nA | 62.5μA | 2.3nA | 11nA |
Current Monitor Accuracy | ±1μA | ±1% or ±5mA | ±2μA | ±0.5% or ±2μA |
Additional info | Programmable Wobble feature. Sinusoidal, 0V to 500V p-p, 0.2Hz to 2Hz |
Open Circuit detection: Vout > 3.1 ± 0.1V All outputs disabled and programs set to zero. Optimized for a nominal load resistance of 0.5Ω |
GUN INTERLOCK CONNECTOR 3 PIN MATE-N-LOK
(TE CONN. P/N: 1-350943-0)
PIN | SIGNAL | I/O | PARAMETER |
---|---|---|---|
1 | Interlock | I | 24V Return |
2 | N/C | - | |
3 | Interlock + | I | 24V Drive |
STATUS OUTPUT CONNECTOR 9 PIN FEMALE D
PIN | SIGNAL | I/O | PARAMETER |
---|---|---|---|
1 | HV ON | O | High voltage status, logic high* when any of the HV outputs is enabled |
2 | HV ON GND | - | High voltage status return |
3 | Fault | O | Fault status, logic high* when any internal fault is detected |
4 | Fault GND | - | Fault status return |
5 | UO | O | Unit Operating status, logic high* when the unit is running correctly |
6 | UO GND | - | Unit Operating status return |
7 | N/C | - | No connection |
8 | N/C | - | No connection |
9 | N/C | - | No connection |
*TTL Signal: High > 2.7V, Low <0.8V
RS-232 COMMUNICATION CONNECTOR 9 PIN MALE D
PIN | SIGNAL | I/O | PARAMETER |
---|---|---|---|
1 | N/C | - | No connection |
2 | RS232 TXD | I | RS-232 receive data |
3 | RS232 TXD | O | RS-232 transmit data |
4 | N/C | - | No connection |
5 | GND | - | Ground |
6 | N/C | - | No connection |
7 | N/C | - | No connection |
8 | N/C | - | No connection |
9 | N/C | - | No connection |
INPUT POWER CONNECTOR
I.E.C. 320 Receptacle with integral fuse
HIGH VOLTAGE OUTPUT CONNECTOR
The unit uses a Claymount CA4 75kV 4 pin receptacle. Mating cable assemblies in different lengths are available. See HOW TO ORDER table.
HOW TO ORDER
Description | Part Number |
---|---|
EBM60-FEG | EBM60N18/FEG |
HV Output Cable - 3 meters | HVC75/4SO/1365 |
HV Output Cable - 4 meters | HVC75/4SO/1366 |
表和图
DIMENSIONS: in.[mm]
SIDE VIEW
TOP VIEW
REAR VIEW