
VS100
- 100kV 电子束高压电源
- 可选择低/高 10μA/100μA 输出电流
- 波纹小于 75mV
- 充分调节,高度稳定
- 无油/固体封装设计
*注意:所有规格如有变更,恕不另行通知。有关最新修订,请参阅本数据表的英文 PDF 版本。

电子束高压电源
Bertan VS100 高压电源是专为精密的电子束应用而设计,如半导体纳米蚀刻、微光学和开发掩模工作。极低的纹波和卓越的稳定性规格,使其成为苛刻应用的理想之选。特点是:通过开关可以选择低的或高的输出电流范围。
固体封装的高压部分消除了一些用户维护问题,同时隔离了部件免受环境变量影响。此电源有全面的过载、电弧和短路保护。提供远程控制编程和监测能力。提供一个从控制电子设备分离的附加高压监测,此允许精确的高压输出的测量。
典型应用:
- 微光学
- 半导体光刻
- 开发掩模工作
规格
(Ref. 128045-001 REV. H)
Input Voltage:
220Vac, ±10%, single phase 50/60 Hertz
Output Voltage:
0 to 100kV, negative polarity. Externally switch selectable to 105kV, ±500 volts
Output Current:
0-10µA, low range
0-100µA, high range
Switch selectable
Line Regulation:
±0.001% of rated voltage over specified input voltage range
Load Regulation:
≤20V for a current change of 25μA to 60μA and 60μA to 25μA
Ripple:
≤75mV peak to peak
Partial High Voltage Discharge:
less than 200mV
Stability:
0.001% per 8 hours after a 6 hour warm up, for a temperature of 20°C ±0.2°C
Temperature Coefficient:
50ppm per degree C over a 10°C to 40°C range
Environmental:
Operating Temperature: 0 to 40 degrees C
Storage Temperature: -40 to 85 degrees C
Humidity: 10 to 90% RH, non condensing
Cooling:
Forced Air-control chassis;
Convection Cooled- high voltage chassis
Front Panel:
Power ON/OFF switch
HV ON/OFF switch
HV ON/OFF indicator
Analog output voltage meter
Dimensions:
Control Chassis: 5.25. H X 19. W X 15.3. D (13.3cm X 48.3cm X 38.4cm)
HV Chassis: 10.25. H X 19. W X 27. D (26.7cm X 48.3cm X 55.9 cm)
Weight:
Control Chassis: 20 pounds (9kg)
HV Chassis: 116 pounds (50kg)
Interface Connector:
19 pin Burndy GOB1619SNE (mating connector provided)
AC Input Connector:
3 pin IEC320 input socket
Output HV Connector:
Claymount 2050-073
Output HV Cable:
Detachable at rear panel, cable not provided.
REMOTE INTERFACE CONNECTOR
Pin | Signal | Signal Parameters |
---|---|---|
A | -5V Reference | -5.0 volts @ 10mA output |
B | Voltage Programming | 0 to -5v = 0 to 100% rated output, Zin = 100KΩ |
C | Spare | N/C |
D | Spare | N/C |
E | Monitor Common | Ground |
F | HV Stat | TTL High = HV OFF, TTL Low = HV ON |
G | +5V | 5 volts @ 250mA output |
H | Interlock | Ground or TTL low to enable interlock |
J | Program Common | Ground |
K | Spare | N/C |
L | Spare | N/C |
M | Spare | N/C |
N | Spare | N/C |
P | Voltage Monitor | 0 to -5V = 0 to 100% rated output, Zout =10KΩ |
R | Current Monitor | 0 to -5V = 0 to 100% rated output, Zout =10KΩ |
S | Spare | N/C |
T | Spare | N/C |
U | Spare | N/C |
V | Spare | N/C |
表和图
DIMENSIONS: in.[mm]
FRONT VIEW
TOP VIEW
BACK VIEW
HV CHASSIS
FRONT VIEW
TOP VIEW
BACK VIEW