VS100

100kV 电子束高压电源
可选择低/高 10μA/100μA 输出电流
波纹小于 75mV
充分调节，高度稳定
无油/固体封装设计

*注意：所有规格如有变更，恕不另行通知。有关最新修订，请参阅本数据表的英文 PDF 版本。

数据表

I-Beam/E-Beam 手册

电子束高压电源

Bertan VS100 高压电源是专为精密的电子束应用而设计，如半导体纳米蚀刻、微光学和开发掩模工作。极低的纹波和卓越的稳定性规格，使其成为苛刻应用的理想之选。特点是：通过开关可以选择低的或高的输出电流范围。

固体封装的高压部分消除了一些用户维护问题，同时隔离了部件免受环境变量影响。此电源有全面的过载、电弧和短路保护。提供远程控制编程和监测能力。提供一个从控制电子设备分离的附加高压监测，此允许精确的高压输出的测量。

典型应用:

微光学
半导体光刻
开发掩模工作

规格

^{(Ref. 128045-001 REV. H)}

Input Voltage:

220Vac, ±10%, single phase 50/60 Hertz

Output Voltage:

0 to 100kV, negative polarity. Externally switch selectable to 105kV, ±500 volts

Output Current:

0-10µA, low range

0-100µA, high range

Switch selectable

Line Regulation:

±0.001% of rated voltage over specified input voltage range

Load Regulation:

≤20V for a current change of 25μA to 60μA and 60μA to 25μA

Ripple:

≤75mV peak to peak

Partial High Voltage Discharge:

less than 200mV

Stability:

0.001% per 8 hours after a 6 hour warm up, for a temperature of 20°C ±0.2°C

Temperature Coefficient:

50ppm per degree C over a 10°C to 40°C range

Environmental:

Operating Temperature: 0 to 40 degrees C

Storage Temperature: -40 to 85 degrees C

Humidity: 10 to 90% RH, non condensing

Cooling:

Forced Air-control chassis;

Convection Cooled- high voltage chassis

Front Panel:

Power ON/OFF switch

HV ON/OFF switch

HV ON/OFF indicator

Analog output voltage meter

Dimensions:

Control Chassis: 5.25. H X 19. W X 15.3. D (13.3cm X 48.3cm X 38.4cm)

HV Chassis: 10.25. H X 19. W X 27. D (26.7cm X 48.3cm X 55.9 cm)

Weight:

Control Chassis: 20 pounds (9kg)

HV Chassis: 116 pounds (50kg)

Interface Connector:

19 pin Burndy GOB1619SNE (mating connector provided)

AC Input Connector:

3 pin IEC320 input socket

Output HV Connector:

Claymount 2050-073

Output HV Cable:

Detachable at rear panel, cable not provided.

REMOTE INTERFACE CONNECTOR

Pin	Signal	Signal Parameters
A	-5V Reference	-5.0 volts @ 10mA output
B	Voltage Programming	0 to -5v = 0 to 100% rated output, Zin = 100KΩ
C	Spare	N/C
D	Spare	N/C
E	Monitor Common	Ground
F	HV Stat	TTL High = HV OFF, TTL Low = HV ON
G	+5V	5 volts @ 250mA output
H	Interlock	Ground or TTL low to enable interlock
J	Program Common	Ground
K	Spare	N/C
L	Spare	N/C
M	Spare	N/C
N	Spare	N/C
P	Voltage Monitor	0 to -5V = 0 to 100% rated output, Zout =10KΩ
R	Current Monitor	0 to -5V = 0 to 100% rated output, Zout =10KΩ
S	Spare	N/C
T	Spare	N/C
U	Spare	N/C
V	Spare	N/C